真空高/低溫度量測探針平台 ( Cryogenic Vaccum Probe station)

.Vaccum: <1*1*10-5 torr,with turbo pump

.Temperature:Liquid nitrogen temp. to 200 degree C, With SDC/VTC 200 Control box

.Sample chamber with four (4) ports for four (4) independent micro-manipulated probe stations.

.2"diameter clear view fused quartz window

.Sample Area:2"* 2"

.Four (4) independent coaxial Low Frequency probe stations, mounted on X, Y, Z translation stages

 X :travel line 50 mm,Y :travel line 25 mm Z :travel line 10 mm.

.Probe arms with 3-axis adjustments

.Vibration Isolation Table

OPTION:

.High Vaccum Pump

.liquid nitrogen storage dewar

.Customized applications Measurement software Development

.Integrated measurement instrument solution

.高溫高濕可通氣體可靠度量測系統規畫