-a.電性量測與光學量測系統

半導體元件真空變溫參數特性-Vacuum IV/CV Probe Station
高頻元件參數-RF Probe and TDR analysis system
光電元件參數-LD/LED LIV Probe System
太陽能薄膜參數特性-Solar cell Probe System
薄膜四點探針-Four Point Sheet Resistivity Probe System
薄膜霍爾效應-Van Der Pauw/Hall Probe System
高壓高電流元件參數-High Voltage/High Current Probe System
磁場元件參數特性-3D Magnetic Field Platform
非接觸式量測系統-Non-Contact Corona-Kelvin Metrology
噴墨沈積系統-lnkjet Deposition System
壓電、熱電、介電元件參數參數特性-Piezoelectric,Dielectric,and Seebeck Measurement System